Spectroscopic Ellipsometry and Reflectometry: A User's Guide 1st Edition

Name: Spectroscopic Ellipsometry and Reflectometry: A User's Guide 1st Edition
Brand: Harland G. Tompkins
SKU: 30329242
Price: 617.96 USD
Availability: InStock
Rating: 5 (3 reviews)

Product ID: 30329242

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Description

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Reviews

E**N

Book on SE

A good follow up on Tompkins "A user's guide to Ellipsometry". This book deals with Spectroscopic Ellipsometry, but also covers the basics of single-wavelength ellipsometry. The book covers analysis of Thermal Oxide, PECVD SiO, SiO2, SiN, a-Si, etc. It also covers the mathematics behind the Lorentz oscillator, used in SE layer modelling.

17.01.2008

J**R

Spectroscopic Ellipsometry and Reflectometry - A Users Guide

Most useful book on this subject I have ever read.

16.11.2000

A**.

Recevied on time

I liked this book very much. This book is up to my expetation.

19.01.2019

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